Zwiększenie produktywności za pomocą niezawodnej technologii utrzymania jakości zasilania

How ABB's PCS100 Active Voltage Conditioner can be applied

Semiconductor processes are extremely sensitive and are dependent on a stable and well regulated electrical power supply to tools and equipment. The most common and costly power quality problem is voltage sags. The PCS100 AVC is specifically designed to correct voltage sags. It does not contain energy storage instead taking power from the remaining electrical grid. As a result it has a very low cost of ownership due to no batteries to maintain and very low electrical loss. It has a small footprint making it suitable for effective use inside plants where floor area is limited.

Typical loads

• Photolithography
• Ion implantations and etching tools
• Wafer testing
• Die cutting  

Typical applications

High end under very stable power supply environments

• Process cooling water system 

• Plasma generator mitigated with AHF (harmonic filter)

Mid tier under scarce power supply environments

• Only critical tools are protected by PCS100 AVC

Need more information?

PCS100 AVC product page
PCS100 AVC video
PCS100 AVC brochure

How ABB's PCS100 Reactive Power Conditioner can be applied

Many of the connected loads in semiconductor plants draw current from the electrical supply rich in harmonics, imbalance and poor power factor. Conventional capacitor based power factor correction can cause switching transients on the supply and be overloaded by harmonic resonance.

The PCS100 Reactive Power Conditioner is an electronic power factor correction system that uses an IGBT inverter to correct power factor, imbalance and low order harmonics (5^th and 7^th). It is an ideal solution in a semiconductor manufacturing environment where many sensitive loads are present.

Typical loads

• Photolithography
• Ion implantations and etching tools
• Wafer testing
• Die cutting
• Air handling

Need more information?

PCS100 RPC product page
PCS100 RPC video
PCS100 RPC brochure

How ABB's PCS100 Industrial UPS can be applied

The PCS100 UPS-I is an ideal complement to the PCS100 AVC voltage conditioner. Unlike the PCS100 AVC, the PCS100 UPS-I incorporates energy storage often in the form of ultracapacitors. This provides the energy to ride through very deep voltage sags and short power outages. Compared with conventional UPSs, the PCS100 UPS-I has very low losses and a small footprint. It is available in a wide range of voltages, including 210 / 220 VAC up to multi-MVA ratings. This makes it suitable for direct connection to many semiconductor tool loads.

Typical loads

• Photolithography
• Ion implantations and etching tools
• Wafer testing
• Die cutting  

Typical applications

High end under very stable power supply environments

• CVD protected by PCS100 UPS-I with 15 seconds
• Gas supply protected by PCS100 UPS-I with 1 second

High end under critical power supply environments

• All tools protected by PCS100 UPS with 1 second
• Sub-systems protected by PCS100 UPS with 1 second

Need more information?

PCS100 UPS-I product page
PCS100 UPS-I video
PCS100 UPS-I brochure