ABB offers a complete solution for Semiconductor wet process control from simple bath chemistries (RCA clean) to complex bath chemistries (metal etch and polymer removal) at a cost suitable for today’s tightening budges. The unique sampling accessory (patented ClippIR+) enables non-intrusive measurement, eliminates the need for tubing modifications, and ensures contamination control.
To ensure worker safety and prevent wafter damage from gas leak, ABB also provides high speed laser-based absorption analyzers to precisely monitor trace amounts (low ppb level) of airborne molecular contaminates (AMC) in Semiconductor cleanrooms.